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Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Myoungsub Kim | - |
| dc.contributor.author | Youngjun Kim | - |
| dc.contributor.author | 손인규 | - |
| dc.contributor.author | Hyungjun Kim | - |
| dc.date.accessioned | 2025-06-12T06:00:18Z | - |
| dc.date.available | 2025-06-12T06:00:18Z | - |
| dc.date.issued | 2020-06-29 | - |
| dc.identifier.uri | https://yscholarhub.yonsei.ac.kr/handle/2021.sw.yonsei/23388 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.title | Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | AVS 20th International Conference on Atomic Layer Deposition (ALD 2020) | - |
| dc.citation.conferencePlace | 미국 | - |
| dc.citation.conferencePlace | Virtual | - |
| dc.citation.conferenceDate | 2020-06-29 ~ 2020-07-01 | - |
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Collections - College of Engineering > 공과대학 전기전자공학부 > 공과대학 전기전자공학과 > 3. Conference Papers
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