Shin, Dain; 손인규; Kim, Donghyun; Kim, Jaehyeok; Nam, Taewook; Kim, Youngjun; Park, Jusang; Nakazawa, Tatsuya; Chung, Seung-min; Kim, Hyungjun
ArticleIssue Date2024CitationJournal of Vacuum Science and Technology A, v.42, no.1PublisherAmerican Institute of Physics