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Superior nanopatterns via adjustable nanoimprint lithography on aluminum oxide in high-K thin films with ultraviolet curable polymer
오진영
; 김은미; 허기석; 김동현; 이동욱; 정해창; Dae-Shik SEO
Article
Issue Date
2021
Citation
RSC ADVANCES, v.12, no.1, pp 88 - 93
Publisher
ROYAL SOC CHEMISTRY
1
Discover
Author
Oh, Jin Young
1
김동현
1
김은미
1
이동욱
1
정해창
1
허기석
1
Subject
ALIGNMENT
1
LIQUID-CRYSTALS
1
Nanoimprinting
1
Nanopatterns
1
ORIENTATION
1
UV polymer
1
Date Issued
2021
1
Language
ENG
1
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