Highly Sensitive Flexible Tactile Sensors in Wide Sensing Range Enabled by Hierarchical Topography of Biaxially Strained and Capillary-Densified Carbon Nanotube Bundles

Abstract

Flexible tactile sensors with high sensitivity have received considerable attention for their use in wearable electronics, human?machine interfaces, and health-monitoring devices. Although various micro/nanostructured materials are introduced for high-performance tactile sensors, simultaneously obtaining high sensitivity and a wide sensing range remains challenging. Here, a resistive tactile sensor is presented based on the hierarchical topography of carbon nanotubes (CNTs) prepared by a low-cost and straightforward manufacturing process. The 3D hierarchical structure of the CNTs over large areas is formed by transferring vertically aligned CNT bundles to a prestrained elastomer substrate and subsequently densifying them through capillary forming, providing a monotonic increase in the contact area as applied pressure. The deformable and hierarchical structure of CNTs allows the sensor to exhibit a wide sensing range (0?100 kPa), high sensitivity (141.72 kPa?1), and low detection limit (10 Pa). Additionally, the capillary-formed CNT structure results in increased durability of the sensor over repeated pressures. Based on these advantages, meaningful applications of tactile sensors, such as object recognition gloves and multidirectional force perceptions, are successfully realized. Given the scalable fabrication method, 3D hierarchically structured CNTs provide an essential step toward next-generation wearable devices.