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Atomic Layer Deposition of Semimetallic TiS2 Contact Layer for Contact Resistance Engineering
- Minu Cho;
- Jeongwoo Seo;
- Hwi Yoon;
- Sohn, Inkyu;
- Jun Hyung Lim;
- 외 2명
- 제목
- Atomic Layer Deposition of Semimetallic TiS2 Contact Layer for Contact Resistance Engineering
- 저자
- Minu Cho; Jeongwoo Seo; Hwi Yoon; Sohn, Inkyu; Jun Hyung Lim; Yunyong Nam; Hyungjun Kim
- 발행일
- 2025-02-14
- 학회명
- The 32nd Korean Conference on Semiconductors (KCS 2025)
- 학회 개최일
- 2025-02-12 ~ 2025-02-15