Contact Resistance Reduction of MoS2-Based Field Effect Transistor Using Semimetallic TiS2 Contact Layer Deposited By Atomic Layer Deposition
  • Jeongwoo Seo
  • Hwi yoon
  • Sangyoon Lee
  • Sohn, Inkyu
  • Hyung-jun Kim
  • 외 2명
제목
Contact Resistance Reduction of MoS2-Based Field Effect Transistor Using Semimetallic TiS2 Contact Layer Deposited By Atomic Layer Deposition
저자
Jeongwoo SeoHwi yoonSangyoon LeeSohn, InkyuHyung-jun KimSeung-min ChungHyungjun Kim
발행일
2024-10-07
학회명
PRiME 2024
학회 개최일
2024-10-06 ~ 2024-10-11