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초록

This paper reports, for the first time, an electrostatic comb-actuated resonant MEMS micromirror that integrates electromagnetic induction sensing for mirror angle readout. The proposed micromirror incorporates a two-layer inductor on the torsional resonantor, which, in an external magnetic field, converts mirror motion into a selfgenerated electrical signal by electromagnetic induction. This approach eliminates the need for external optical detectors and requires no additional angle-sensing power. In the torsional resonant mode, the mirror with inductor provides optical scanning and intrinsic angle sensing via the integrated inductor. The induced voltage is linearly correlated with the optical scan angle, enabling real-time electrical readout for feedback control. Experimental results confirm the linear correlation between optical scan angle and induced voltage, with a minimum detectable angular change of 0.18°. These results establish electromagnetic self-sensing as a new approach for electrostatically driven MEMS micromirrors, unifying wide-angle scanning with intrinsic angle readout.