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Atomic Layer Deposition of Ultra Low-k Amorphous Boron Nitride for Futuristic Inter Metal Dielectric
- Sohn, Inkyu;
- Jihoon Park;
- Sangyoon Lee;
- Jeongwoo Seo;
- Jisang yoo;
- 외 2명
- 제목
- Atomic Layer Deposition of Ultra Low-k Amorphous Boron Nitride for Futuristic Inter Metal Dielectric
- 저자
- Sohn, Inkyu; Jihoon Park; Sangyoon Lee; Jeongwoo Seo; Jisang yoo; Seung-min Chung; Hyungjun Kim
- 발행일
- 2024-08-06
- 학회명
- AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)
- 학회 개최일
- 2024-08-04 ~ 2024-08-07