Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array
  • Park, Seungwon
  • Kim, Myoungsub
  • Kim, Tae Hyun
  • Lee, Minkyu
  • Na, Seunggyu
  • ... 손인규
  • 외 4명
제목
Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array
저자
Park, SeungwonKim, MyoungsubKim, Tae HyunLee, MinkyuNa, Seunggyu손인규Kim, TaehoonLee, TaeyoonChung, Seung-MinKim, Hyungjun
DOI
10.1016/j.jallcom.2023.172284
발행일
2023-12
저널명
Journal of Alloys and Compounds
968