상세 보기
Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array
- Park, Seungwon;
- Kim, Myoungsub;
- Kim, Tae Hyun;
- Lee, Minkyu;
- Na, Seunggyu;
- ... 손인규;
- 외 4명
- 제목
- Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array
- 저자
- Park, Seungwon; Kim, Myoungsub; Kim, Tae Hyun; Lee, Minkyu; Na, Seunggyu; 손인규; Kim, Taehoon; Lee, Taeyoon; Chung, Seung-Min; Kim, Hyungjun
- 발행일
- 2023-12
- 권
- 968