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Atomic-scale Crystal Phase Transformation of Atomic Layer Deposited Antimony Telluride Thin Films with Substrate-dependent Orientations
- Lee, Sangyoon;
- Seo, Jeongwoo;
- Sohn, Inkyu;
- Kang, Youngjae;
- Lee, Changseung;
- 외 3명
초록
Among chalcogenides for phase-change memory, Sb2Te3 is attracting attention for its huge potential, along with recent demands for atomic layer deposition (ALD). We aimed to study atomic-scale thin film growth and phase transformation of ALD Sb2Te3 thin films with substrate dependency. Comparatively, thin film growth trends of ALD Sb2Te3 on SiO2 and W substrate were studied by observing transformation of crystal structures, and trends in electrical resistivity. On SiO2, predominant amorphous phases at initial stage were observed, followed by polycrystalline island growth with randomly oriented grains. However, on crystalline W, the highly out-of-plane (00l) orientations and layer-by-layer growth was found.
- 제목
- Atomic-scale Crystal Phase Transformation of Atomic Layer Deposited Antimony Telluride Thin Films with Substrate-dependent Orientations
- 저자
- Lee, Sangyoon; Seo, Jeongwoo; Sohn, Inkyu; Kang, Youngjae; Lee, Changseung; Yang, Wooyoung; Chung, Seung-Min; Kim, Hyungjun
- 발행일
- 2023-05-23
- 학회명
- The 26th edition of IITC ( International Interconnect Technology Conference)
- 개최지
- 드레스덴
- 학회 개최일
- 2023-05-22 ~ 2023-05-25