ScholarWorks@Y-Scholar Hub

초록

Microelectromechanical system (MEMS) magnetometers are widely used in various industries due to their small size and integration capabilities. Lorentz force MEMS magnetometers have gained attention for their simple working principle, but they have limitations, such as high power consumption and self-heating. Electrostatically driven MEMS magnetometers using electromagnetic induction sensing offer low power consumption and operation stability, but they are limited to single-axis sensing. We propose an electrostatically driven two-axis MEMS magnetometer using an electromagnetic inductor on an eccentric resonator. The eccentric structure consists of a designated asymmetric inner mass within an outer mass, which leads to two torsional resonance modes with orthogonal directions. By applying a driving voltage with a frequency that matches the corresponding resonant frequency, each resonance mode can be utilized for either X- or Y-axis magnetic field sensing. The MEMS magnetometers are implemented through the MEMS fabrication processes without additional assembly. Experimental verification showed that this monolithic two-axis MEMS magnetometer accurately detected the vector component of the applied magnetic field, encompassing both its magnitude and direction. The MEMS magnetometer has sensitivities of 21.91 and 57.92 mu V/mT in the X- and Y-axis sensing modes, respectively, with high linearity.