Enhancing Contact Properties of MoS2 based FETs by Al2O3 Interlayer Engineering via Atomic layer deposition
  • Jihoon Park
  • Hwi Yoon
  • Sanghoon Lee
  • Seonyeong Park
  • Sohn, Inkyu
  • 외 1명
제목
Enhancing Contact Properties of MoS2 based FETs by Al2O3 Interlayer Engineering via Atomic layer deposition
저자
Jihoon ParkHwi YoonSanghoon LeeSeonyeong ParkSohn, InkyuHyungjun Kim
발행일
2025-02-14
학회명
The 32nd Korean Conference on Semiconductors (KCS 2025)
학회 개최일
2025-02-12 ~ 2025-02-15