Atomic Layer Deposition of TiS2 as Contact Electrode in MoS2-based FETs with Low Contact Resistance by Enhancing Interface Properties
  • Hwi yoon
  • Sangyoon Lee
  • Seo, Jeongwoo
  • 손인규
  • Hyung-jun Kim
  • 외 2명
제목
Atomic Layer Deposition of TiS2 as Contact Electrode in MoS2-based FETs with Low Contact Resistance by Enhancing Interface Properties
저자
Hwi yoonSangyoon LeeSeo, Jeongwoo손인규Hyung-jun KimYujin LeeHyungjun Kim
발행일
2024-06-12
학회명
Soft Matter, Fluids, Interfaces
학회 개최일
2024-06-09 ~ 2024-06-15