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Ultra Low-k Properties of Amorphous Boron Nitride Synthesized by Plasma-Enhanced Atomic Layer Deposition
- 손인규;
- Jaewon Kim;
- Taejin Choi;
- Hyungjun Kim
- 제목
- Ultra Low-k Properties of Amorphous Boron Nitride Synthesized by Plasma-Enhanced Atomic Layer Deposition
- 저자
- 손인규; Jaewon Kim; Taejin Choi; Hyungjun Kim
- 발행일
- 2024-07-12
- 학회명
- 6th International Symposium on Plasmas for Catalysis and Energy Materials
- 학회 개최일
- 2024-07-10 ~ 2024-07-12