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Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling
- Myoungsub Kim;
- Youngjun Kim;
- 손인규;
- Hyungjun Kim
- 제목
- Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling
- 저자
- Myoungsub Kim; Youngjun Kim; 손인규; Hyungjun Kim
- 발행일
- 2020-06-29
- 학회명
- AVS 20th International Conference on Atomic Layer Deposition (ALD 2020)
- 개최지
- Virtual
- 학회 개최일
- 2020-06-29 ~ 2020-07-01