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Selective Passivation of 2D TMD Surface Defects by Atomic Layer Deposition for Enhancing Recovery Rate of Gas Sensor
- Minji Kim;
- Sohn, Inkyu;
- Dain Shin;
- Sangyoon Lee;
- Hwi Yoon;
- 외 3명
- 제목
- Selective Passivation of 2D TMD Surface Defects by Atomic Layer Deposition for Enhancing Recovery Rate of Gas Sensor
- 저자
- Minji Kim; Sohn, Inkyu; Dain Shin; Sangyoon Lee; Hwi Yoon; Jisang Yoo; Seung-min Chung; Hyungjun Kim
- 발행일
- 2025-06-24
- 학회명
- ALD/ALE 2025
- 학회 개최일
- 2025-06-22 ~ 2025-06-25