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Engineering Al₂O₃ Interlayer via Atomic Layer Deposition for Enhancing Contact Properties of MoS₂-Based FET
- Minu Cho;
- Hwi Yoon;
- Sanghun Lee;
- Seonyeong Park;
- Sohn, Inkyu;
- 외 1명
초록
Engineering Al₂O₃ Interlayer via Atomic Layer Deposition for Enhancing Contact Properties of MoS₂-Based FET
- 제목
- Engineering Al₂O₃ Interlayer via Atomic Layer Deposition for Enhancing Contact Properties of MoS₂-Based FET
- 저자
- Minu Cho; Hwi Yoon; Sanghun Lee; Seonyeong Park; Sohn, Inkyu; Hyungjun Kim
- 발행일
- 2025-06-24
- 학회명
- ALD/ALE 2025
- 학회 개최일
- 2025-06-22 ~ 2025-06-25