Growth and Electrical Characteristics of PE-ALD Germanium Sulfide for 3D Cross-Point Memory
제목
Growth and Electrical Characteristics of PE-ALD Germanium Sulfide for 3D Cross-Point Memory
저자
Myoungsub KimYoungjun Kim손인규Hyungjun Kim
발행일
2020-10-04
학회명
PRiME 2020
개최지
Virtual
학회 개최일
2020-10-04 ~ 2020-10-09