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Atomic Layer Deposition of Al2O3 on 2D MoS2 for Enhancing the Recovery rate of Gas Sensor

Wi, Sungjoo; Sohn, Inkyu; Kim, Youngjun; Kim, Hyungjun

ConferenceIssue Date2021Place미국
Selective passivation of 2D TMD surface defects by atomic layer deposited Al2O3 to enhance recovery properties of gas sensor

손인규; Wi, Sungjoo; Kim, Youngjun; Shin, Dain; Kim, Myoungsub; Lee, Sangyoon; Yoon, Hwi; Yoo, Jisang; Chung, Seung-min; Kim, Hyungjun

ArticleIssue Date2024CitationApplied Surface Science, v.646, pp 158906PublisherElsevier BV
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