Improving Performances of Oxide Phototransistors Using a Mechano-Chemically Treated Porous Visible Light Absorption Layer

Abstract

In this research, the use of indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) with a porous oxide layer (POL) resulting from the mechanochemical treatment of spin-coated oxide films is suggested for the detection of visible light. Mechanochemical treatment is a new technique that uses cellophane tape to induce the selective formation of hydrophobic dots on the surface of the a-IGZO. These dots interfere with the deposition of the film during spin coating, resulting in pore formation. The IGZO TFT with a POL exhibits 341.32 A/W photoresponsivity, 1.10 x 10(6) photosensitivity, and 4.54 x 10(10) Jones detectivity under 532 nm light illumination.