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Microelectromechanical Switch with Carbon Nanotube Arrays for High-Temperature Operation

Authors
Jo, EunhwanKang, YunsungSim, SangjunChoi, JungwookKim, Jongbaeg
Issue Date
202001
URI
https://yscholarhub.yonsei.ac.kr/handle/2021.sw.yonsei/5873
DOI
10.1109/mems46641.2020.9056285
Conference Name
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Place
캐나다
Vancouver, BC, Canada
metadata.conference.dc.citation.conferenceName
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
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