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Enhancement in the Mobility and the Stability of Solution-Processed ZincTin Oxide Thin-Film Transistors Using Alkali Metal Superoxideopen access

Authors
Jung, T.S.Lee, H.Kim, H.J.Lee, J.H.Min, W.K.Park, KyunghoKim, H.J.
Issue Date
May-2019
Publisher
John Wiley and Sons Inc
Keywords
Alkali metal; Oxide semiconductor; Solution process; Superoxide radical; Thin film transistor
Citation
SID Symposium Digest of Technical Papers, v.50, no.1, pp 1298 - 1301
Pages
4
Journal Title
SID Symposium Digest of Technical Papers
Volume
50
Number
1
Start Page
1298
End Page
1301
URI
https://yscholarhub.yonsei.ac.kr/handle/2021.sw.yonsei/6628
DOI
10.1002/sdtp.13172
ISSN
0097-966X
2168-0159
Abstract
We have studied how to improve the mobility and stability of solution processed zinc-tin oxide thin-film transistors (ZTO TFTs) simultaneously using multifunctional potassium superoxide precursor. Potassium cations in the potassium superoxide precursor acts as a shallow donor in the ZTO thin film to improve the carrier concentration (electron), which allows the potassium-doped ZTO TFT to exhibit high mobility. Then, the anion of the precursor exists as a superoxide radical, and it showed the effect of reducing the oxygen vacancy in the process of forming the oxide thin film. Consequently, potassiumdoped ZTO TFT using potassium superoxide precursor exhibited improved mobility and stability, showing an increase in the mobility from 5.11 to 8.36 cm2/Vs and a decrease in the threshold voltage shift from 4.65 to 3.36 V under a negative bias temperature illumination stress test conducted over 5,000 sec.. © 2019 SID.
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