Thermal Conductivity Measurements of BeO Thin Films Grown by Plasma Enhanced Atomic Layer Deposition
제목
Thermal Conductivity Measurements of BeO Thin Films Grown by Plasma Enhanced Atomic Layer Deposition
저자
Jihyun, Kim배종현
발행일
2024-10-16
학회명
APWS 2024
학회 개최일
2024-10-13 ~ 2024-10-17