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Thermal Conductivity Measurements of BeO Thin Films Grown by Plasma Enhanced Atomic Layer Deposition
- Jihyun, Kim;
- 배종현
- 제목
- Thermal Conductivity Measurements of BeO Thin Films Grown by Plasma Enhanced Atomic Layer Deposition
- 저자
- Jihyun, Kim; 배종현
- 발행일
- 2024-10-16
- 학회명
- APWS 2024
- 학회 개최일
- 2024-10-13 ~ 2024-10-17