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Demonstration of Atomic Layer Deposition of BeO using Discrete Feeding Method
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Demonstration of Atomic Layer Deposition of BeO using Discrete Feeding Method
저자
배종현
발행일
2024-01-25
학회명
제 31회 한국반도체학술대회
학회 개최일
2024-01-24 ~ 2024-01-26

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