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Thermal atomic layer deposition of ternary Ge-S-Se alloy for advanced ovonic threshold switch selectors in three-dimensional cross-point memory array
- Authors
- Park, Seungwon; Kim, Myoungsub; Kim, Tae Hyun; Lee, Minkyu; Na, Seunggyu; 손인규; Kim, Taehoon; Lee, Taeyoon; Chung, Seung-min; Kim, Hyungjun
- Issue Date
- Dec-2023
- Publisher
- Elsevier BV
- Citation
- Journal of Alloys and Compounds, v.968
- Journal Title
- Journal of Alloys and Compounds
- Volume
- 968
- ISSN
- 0925-8388
1873-4669
- Files in This Item
- Appears in
Collections - College of Engineering > Electrical and Electronic Engineering > 1. Journal Articles
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