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Atomic Layer Deposition of GeS Film for 3D Cross-Point Memory Scaling
- Authors
- Myoungsub Kim; Youngjun Kim; 손인규; Hyungjun Kim
- Issue Date
- 29-Jun-2020
- Place
- 미국
Virtual
- Conference Date
- 2020-06-29 ~ 2020-07-01
- metadata.conference.dc.citation.conferenceName
- AVS 20th International Conference on Atomic Layer Deposition (ALD 2020)
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Collections - College of Engineering > 공과대학 전기전자공학부 > 공과대학 전기전자공학과 > 3. Conference Papers
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